Vacuum deposited polycrystalline silicon films for solar cell applications. Quarterly report, September 15-December 31, 1979
Polycrystalline silicon films 14-22 ..mu..m thick and with average grain diameters of 20-40 ..mu..m were deposited by vacuum deposition onto both ceramic and sapphire substrates which were previously coated with a thin (1-2 ..mu..m) TiB/sub 2/ conducting layer. The large grains are the result of an interaction in the initial growth stages between silicon and TiB/sub 2/. SIMS studies of B/Ti/Al/sub 2/O/sub 3/, B/Al/sub 2/O/sub 3/, and Ti/Al/sub 2/O/sub 3/, interactions are reported as part of a continuing investigation of TiB/sub 2/ formation and silicon interactions on the TiB/sub 2/ surface. The increase in grain size has led to an improvement in the open-circuit voltage V/sub oc/, but not to an increase in the short-circuit current J/sub sc/. Capacitance-voltage measurements give results characteristic of an abrupt junction and a build-in voltage V/sub D/ consistent with the measured doping levels. A simple method for measuring the minority carrier diffusion length in the base region L/sub n/ is described. The measurements indicate that there is little change in L/sub n/ between large (20-40 ..mu..m) and small (approx. 5 ..mu..m) grained samples.
- Research Organization:
- Johns Hopkins Univ., Laurel, MD (USA). Applied Physics Lab.
- DOE Contract Number:
- AC02-77CH00178
- OSTI ID:
- 5288114
- Report Number(s):
- SERI/PR-8278-1-T1
- Country of Publication:
- United States
- Language:
- English
Similar Records
Vacuum deposited polycrystalline silicon films for solar cell applications. Final report, 29 September 1978-30 September 1979
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Related Subjects
36 MATERIALS SCIENCE
SILICON
VACUUM COATING
SILICON SOLAR CELLS
FABRICATION
PERFORMANCE
CERAMICS
DIFFUSION LENGTH
ELECTRICAL PROPERTIES
FILMS
GRAIN SIZE
ION MICROPROBE ANALYSIS
MASS SPECTROSCOPY
MULLITE
POLYCRYSTALS
SAPPHIRE
SPECTRAL RESPONSE
SUBSTRATES
TITANIUM BORIDES
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
BORIDES
BORON COMPOUNDS
CHALCOGENIDES
CHEMICAL ANALYSIS
CORUNDUM
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
DIRECT ENERGY CONVERTERS
ELEMENTS
EQUIPMENT
INORGANIC ION EXCHANGERS
ION EXCHANGE MATERIALS
MICROSTRUCTURE
MINERALS
NONDESTRUCTIVE ANALYSIS
OXIDES
OXYGEN COMPOUNDS
PHOTOELECTRIC CELLS
PHOTOVOLTAIC CELLS
PHYSICAL PROPERTIES
SEMIMETALS
SIZE
SOLAR CELLS
SOLAR EQUIPMENT
SPECTROSCOPY
SURFACE COATING
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
140501* - Solar Energy Conversion- Photovoltaic Conversion
360601 - Other Materials- Preparation & Manufacture