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Low energy electron microscopy of nanometer scale phenomena

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)
DOI:https://doi.org/10.1116/1.585581· OSTI ID:5264310
; ;  [1]
  1. Technische Univ. Clausthal (West Germany)
The physical principles of low energy electron microscopy (LEEM) are briefly discussed. The application of this nonscanning imaging method to the study of surface phenomena on the 10 nm scale is illustrated by examples of the growth and desorption of metal films on metal and semiconductor substrates as well as by phase transitions in these films.
OSTI ID:
5264310
Journal Information:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
Country of Publication:
United States
Language:
English