Low energy electron microscopy of nanometer scale phenomena
Journal Article
·
· Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)
- Technische Univ. Clausthal (West Germany)
The physical principles of low energy electron microscopy (LEEM) are briefly discussed. The application of this nonscanning imaging method to the study of surface phenomena on the 10 nm scale is illustrated by examples of the growth and desorption of metal films on metal and semiconductor substrates as well as by phase transitions in these films.
- OSTI ID:
- 5264310
- Journal Information:
- Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360102 -- Metals & Alloys-- Structure & Phase Studies
360602* -- Other Materials-- Structure & Phase Studies
ELECTRON MICROSCOPY
ELEMENTS
FILMS
MATERIALS
METALS
MICROSCOPY
MOLECULAR STRUCTURE
PHASE TRANSFORMATIONS
SEMICONDUCTOR MATERIALS
SURFACE PROPERTIES
THIN FILMS
360102 -- Metals & Alloys-- Structure & Phase Studies
360602* -- Other Materials-- Structure & Phase Studies
ELECTRON MICROSCOPY
ELEMENTS
FILMS
MATERIALS
METALS
MICROSCOPY
MOLECULAR STRUCTURE
PHASE TRANSFORMATIONS
SEMICONDUCTOR MATERIALS
SURFACE PROPERTIES
THIN FILMS