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Scanning tunneling microscopy of various graphitic surfaces

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)
DOI:https://doi.org/10.1116/1.585260· OSTI ID:5264290
 [1]
  1. IBM Corp., Endicott, NY (United States)
This paper reports on the use of scanning tunneling microscopy, on atomic scale and larger, to study the surface structure of highly oriented pyrolytic graphite (HOPG), pyrolytic graphite (PG), benzene-derived graphite (BDG), and triphenylene-derived graphite. Good registry of the (0001) surface of PG and BDG was determined by comparison with HOPG. Using a large-scale scan (1{mu}m), steps, crystalline sizes, and other large features were compared. Highly symmetric hexagonal etch pits a few hundred nm in width and tens of nm deep, representing the nm scale effects of oxidation, were observed on the surface of BDG.
OSTI ID:
5264290
Journal Information:
Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
Country of Publication:
United States
Language:
English