Performance comparison of positive branch unstable resonator cavities for excimer lasers
Journal Article
·
· Appl. Opt.; (United States)
The near- and far-field performance of three practical positive branch unstable resonator designs was compared for a commercial excimer laser operating on ArF and KrF. Atmospheric attenuation at 193 and 248 nm was measured.
- Research Organization:
- Lumonics, Inc., 105 Schneider Road, Kanata, Ontario K2K 1Y3, Canada
- OSTI ID:
- 5249523
- Journal Information:
- Appl. Opt.; (United States), Journal Name: Appl. Opt.; (United States) Vol. 27:9; ISSN APOPA
- Country of Publication:
- United States
- Language:
- English
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