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Performance comparison of positive branch unstable resonator cavities for excimer lasers

Journal Article · · Appl. Opt.; (United States)
DOI:https://doi.org/10.1364/AO.27.001840· OSTI ID:5249523
The near- and far-field performance of three practical positive branch unstable resonator designs was compared for a commercial excimer laser operating on ArF and KrF. Atmospheric attenuation at 193 and 248 nm was measured.
Research Organization:
Lumonics, Inc., 105 Schneider Road, Kanata, Ontario K2K 1Y3, Canada
OSTI ID:
5249523
Journal Information:
Appl. Opt.; (United States), Journal Name: Appl. Opt.; (United States) Vol. 27:9; ISSN APOPA
Country of Publication:
United States
Language:
English

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