Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels

Journal Article · Sat Apr 01 04:00:00 EST 1989 · IEEE (Institute of Electrical and Electronics Engineers) Transactions on Instrumentation and Measurement; (USA)

DOI:https://doi.org/10.1109/19.192345· OSTI ID:5234052

Tanaka, M; Nakyama, K ^[1]; Yamagami, T ^[2]

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1. Nanometrology Group, Quantum Section, National Research Lab. of Metrology, Umezono, Tsukuba (JP)
2. Hoya Corp., 3-3-1 Musashino, Akishima, Tokyo (JP)

Heterodyne laser interferometry and its accuracy at subnanometer levels are discussed. The simplest optical nonpolarization heterodyne interferometer is tested experimentally in order to understand and reduce fringe distortion. An accuracy of 0.1 mm for the 633-nm He-Ne laser interferometer is achieved.

• OSTI ID: 5234052
• Journal Information: IEEE (Institute of Electrical and Electronics Engineers) Transactions on Instrumentation and Measurement; (USA), Journal Name: IEEE (Institute of Electrical and Electronics Engineers) Transactions on Instrumentation and Measurement; (USA) Vol. 38:2; ISSN IEIMA; ISSN 0018-9456
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
426002* -- Engineering-- Lasers & Masers-- (1990-)
ACCURACY
ELECTRONIC EQUIPMENT
EQUIPMENT
GAS LASERS
HELIUM-NEON LASERS
HETERODYNE RECEIVERS
INTERFEROMETRY
INTERPOLATION
LASERS
MICROWAVE EQUIPMENT
NUMERICAL SOLUTION
RADIO EQUIPMENT