TEM observation of bubbles in He-implanted. cap alpha. -Fe
Helium ions of 15 keV energy were implanted at room temperature into well annealed, high purity (99.99 at. %) Fe foil to a fluence of 4 x 10/sup 16/ He/cm/sup 2/. Calculations with a TRIM Monte Carlo code show that these conditions should produce an approximately Gaussian depth distribution with a peak He concentration of 6 at. % centered at a depth of R/sub p/ = 69 nm with an rms spread of 32 nm. The implanted foil was jet electropolished from the unimplanted side with a perchloric acid and ethanol solution to produce an electron transparent thin area which included the He-implanted layer. The specimen was examined by TEM at 120 kV. To correct for the disturbance of the objective lense magnetic fields by the ferromagnetic specimen, the instrument was re-aligned with the sample in place. Specimens which were annealed after He implantation but prior to thinning were also examined.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 5228863
- Report Number(s):
- SAND-82-0419C; CONF-820806-1; ON: DE82011571; TRN: 82-016106
- Resource Relation:
- Conference: 40. EMSA annual meeting, Washington, DC, USA, 9 Aug 1982
- Country of Publication:
- United States
- Language:
- English
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