An ultrahigh vacuum-compatible scanning tunneling microscope head mounted on a 2 3/4 in. outer diameter flange

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.585478· OSTI ID:5221513

Schmid, A K; Kirschner, J ^[1]

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1. Frie Univ. Berlin (Germany)

This paper describes a simplified ultra-high-vacuum scanning-tunneling-microscope (UHV-STM). The UHV-STM can be mounted through a 35-mm i.d. flange in arbitrary spatial orientation. It is thermally well-compensated and highly insensitive to vibrations. The scanner provides atomic resolution capability as well as a large scan range of 7x7 {mu}m. The UHV-STM is driven by unmodified Nanoscope 2 electronics. Samples as well as tips are exchangeable via an airlock system. Topographic images of the 7x7 reconstruction on Si(111) and of micron-size Au islands on Si(111) are shown.

• OSTI ID: 5221513
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

440800* -- Miscellaneous Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
DESIGN
ELECTRON MICROSCOPES
ELEMENTS
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IMAGES
METALS
MICROSCOPES
ORIENTATION
SEMIMETALS
SILICON
SPACE DEPENDENCE
TEMPERATURE EFFECTS
TRANSITION ELEMENTS
ULTRAHIGH VACUUM