Electrically triggered 200 kV rail-gap switch for wide aperture excimer lasers

Journal Article · Thu Mar 01 04:00:00 EST 1984 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.333220· OSTI ID:5220571

Endoh, A; Watanabe, S; Watanabe, M

A wide aperture (7 x 7 cm/sup 2/), high output energy (5 J in KrF and 13.8 J in XeC1), UV preionized excimer laser is described. A self-breakdown rail gap was employed as an output switch with the maximum voltage and current up to 230 kV and 300 kA, respectively. To solve the switching jitter problem associated with the self-breakdown, an electrical triggering was investigated. The measured minimum switching time delay and gap closing time were 40 and 10 ns, respectively. The number of channels up to 50 was observed with a uniform distribution over the 80-cm electrode length. The triggering jitter was measured to be less than a nanosecond. The maximum operation voltage of the triggered rail gap was 200 kV. The successful trigger operation was obtained in the range 30%--98% of the self-breakdown voltage.

• Research Organization: The Institute for Solid State Physics, University of Tokyo, Tokyo, Japan
• OSTI ID: 5220571
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 55:5; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
AMPLIFIERS
APERTURES
BREAKDOWN
CURRENTS
DESIGN
ELECTRIC CURRENTS
ELECTRIC POTENTIAL
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELECTRONIC EQUIPMENT
ENERGY
EQUIPMENT
GAS LASERS
LASERS
OPENINGS
OPERATION
PERFORMANCE
PULSE CIRCUITS
SPARK GAPS
SWITCHES
TIME DELAY
TRIGGER CIRCUITS