Pumping of inert gases by electron-impact ionization sources and associated memory effects

Journal Article · Sun Jan 01 04:00:00 EST 1984 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.572625· OSTI ID:5220385

Willis, R D; Allman, S L; Chen, C H; Alton, G D; Hurst, G S

Radioactive /sup 85/Kr was used in a closed volume under moderate vacuum to investigate mechanisms by which inert gas atoms are pumped in an electron-impact ionization source of a simple diode design. Results are consistent with a mechanism involving the conversion of inert gas ions into energetic neutrals at the cathode followed by reflection and trapping of some of the neutral atoms in nearby surfaces. We discuss the possibility that the source pumping speed is enhanced due to burial of the trapped neutrals by material released in low-energy sputtering processes. The implications of these results for reducing memory effects in UHV mass spectrometer systems are discussed.

• Research Organization: Health and Safety Research Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830
• DOE Contract Number: W-7405-ENG-26
• OSTI ID: 5220385
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 2:1; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420700* -- Engineering-- Vacuum Engineering-- (-1987)
640301 -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
BETA DECAY RADIOISOTOPES
BETA-MINUS DECAY RADIOISOTOPES
EFFICIENCY
ELECTRIC POTENTIAL
ELECTRICAL PUMPING
ELECTRON BEAM PUMPING
ELEMENTS
EVEN-ODD NUCLEI
FLUIDS
GASES
HOURS LIVING RADIOISOTOPES
INTERMEDIATE MASS NUCLEI
ION SOURCES
ISOMERIC TRANSITION ISOTOPES
ISOTOPES
KRYPTON
KRYPTON 85
KRYPTON ISOTOPES
MASS SPECTROMETERS
MEASURING INSTRUMENTS
NONMETALS
NUCLEI
PUMPING
RADIOISOTOPES
RARE GASES
SPECTROMETERS
SPUTTERING
TRAPPING
YEARS LIVING RADIOISOTOPES