Ion energy spread and current measurements of the rf-driven multicusp ion source

Journal Article · Sat Mar 01 04:00:00 EST 1997 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1147948· OSTI ID:520953

Lee, Y; Gough, R A; Kunkel, W B; Leung, K N; Perkins, L T; Pickard, D S; Sun, L; Vujic, J; Williams, M D; Wutte, D ^[1]

---

1. Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 (United States)

Axial energy spread and useful beam current of positive ion beams have been carried out using a radio frequency (rf)-driven multicusp ion source. Operating the source with a 13.56 MHz induction discharge, the axial energy spread is found to be approximately 3.2 eV. The extractable beam current of the rf-driven source is found to be comparable to that of filament-discharge sources. With a 0.6 mm diameter extraction aperture, a positive hydrogen ion beam current density of 80 mA/cm{sup 2} can be obtained at a rf input power of 2.5 kW. The expected source lifetime is much longer than that of filament discharges. {copyright} {ital 1997 American Institute of Physics.}

• Research Organization: Lawrence Berkeley National Laboratory
• DOE Contract Number: AC03-76SF00098
• OSTI ID: 520953
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 3 Vol. 68; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

43 PARTICLE ACCELERATORS
BEAM CURRENTS
BEAM DYNAMICS
CATIONS
HYDROGEN IONS
ION BEAMS
ION SOURCES
LIFETIME
MICROELECTRONICS
OPERATION
POWER