Empirical study of electron backscattering from thin films

Journal Article · Fri Aug 01 04:00:00 EDT 1980 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.328263· OSTI ID:5208746

Sogard, M R

Empirical fits to data are obtained which determine the backscattered electron coefficient for films of arbitrary thickness and electrons of normal incidence over the energy range 20--53 keV for the elements Al, Cu, Ag, Au, and Bi. From this is derived a ''universal'' fit which describes with reasonable accuracy the backscattered electron coefficients of Be, Al, Cu, Ge, Ag, Au, Pb, and Bi over a somewhat larger energy range. By extension, it should predict the coefficients of other elements over at least the atomic number range Z=4--83. An expression is suggested for predicting the backscattered electron coefficient for films of arbitrary thickness and composed of compounds of several elements. Approximate agreement with experiment is obtained.

• Research Organization: The Enrico Fermi Institute and The Department of Physics, The University of Chicago, Chicago, Illinois 60637
• OSTI ID: 5208746
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 51:8; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALKALINE EARTH METALS
ALUMINIUM
BACKSCATTERING
BERYLLIUM
BISMUTH
COLLISIONS
COMPARATIVE EVALUATIONS
COPPER
DATA
DIMENSIONS
ELECTRON COLLISIONS
ELEMENTS
ENERGY RANGE
EQUATIONS
FILMS
GERMANIUM
GOLD
INFORMATION
KEV RANGE
LEAD
MATHEMATICAL MODELS
METALS
SCATTERING
SILVER
THICKNESS
TRANSITION ELEMENTS