Auger evaluation of plasma cleaning of ceramics and metals
Technical Report
·
OSTI ID:5187294
Low energy argon ion plasma cleaning is sometimes used to remove light contamination from components used in vacuum devices. Auger electron spectroscopic and x-ray photo electron spectroscopic evaluations of plasma etched ceramics, molybdenum, Rodar and stainless steel indicate that thin films of carbon and other surface contaminants are readily removed from ceramics and metals by the plasma cleaning process. Auger results show that plasma cleaning leaves no residue and cleans surfaces as effectively as hydrogen firing. However, a thin, clean oxide is formed on some metals that have been plasma cleaned.
- Research Organization:
- General Electric Co., St. Petersburg, FL (USA). Neutron Devices Dept.
- DOE Contract Number:
- AC04-76DP00656
- OSTI ID:
- 5187294
- Report Number(s):
- GEPP-TIS-636; ON: DE82012526
- Country of Publication:
- United States
- Language:
- English
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