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Title: In-situ nanoindentation of Si in the high voltage electron microscope

Conference ·
OSTI ID:5170077
;

No abstract prepared.

Research Organization:
Lawrence Berkeley National Lab., CA (United States)
Sponsoring Organization:
USDOE Director, Office of Science (United States)
DOE Contract Number:
AC03-76SF00098
OSTI ID:
5170077
Report Number(s):
LBNL-42748-Abs.
Resource Relation:
Conference: ICEM14, Cancun (Mexico), 08/1998
Country of Publication:
United States
Language:
English

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Related Subjects

36 MATERIALS SCIENCE
SILICON
ELECTRON MICROSCOPY
SURFACE TREATMENTS
IN-SITU PROCESSING
SEMIMETALS
MICROSCOPY
PROCESSING
ELEMENTS
360601* - Other Materials- Preparation & Manufacture