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Title: Narrow linewidth gain measurements in KrF and ArF excimer amplifiers pumped longitudinally by high-power electrons

Journal Article · · Journal of Applied Physics; (United States)
DOI:https://doi.org/10.1063/1.349157· OSTI ID:5167262
;  [1]
  1. Sandia National Laboratories, Albuquerque, New Mexico (USA)

Single-pulse KrF and ArF gain measurements have been conducted with an excimer amplifier longitudinally pumped by a high-power ({similar to}5-MW/cm{sup 3} deposition) electron beam. This amplifier has preserved the narrow linewidth ({similar to}10 GHz) exhibited by the probe laser beam generated by a grating-tuned, discharge pumped excimer laser. Single-pass gain was measured at 248.45 nm, the peak of the KrF laser gain profile, for a laser pulse with full width half maximum (FWHM) of 20 ns. Analysis of the gain data by a modified Rigrod steady-state formulation yielded values for the small-signal gain, the nonsaturable absorption, and saturation intensity of {ital g}{sub 0} = 12.6%/cm, {alpha}{similar to}0.45%/cm, and {ital I}{sub {ital s}} = 4.1 MW/cm{sup 2}, respectively, for a 750-Torr laser mix. The corresponding gain peak measurement for an ArF beam at 193.31 nm with FWHM of 15 ns produced {ital g}{sub 0} = 12.1%/cm, {alpha}{similar to}0.70%/cm, and {ital I}{sub {ital s}} = 6.7 MW/cm{sup 2} for a 963-Torr laser mix with the same stopping power as the KrF mix. Measurement of gain at 193.68 nm, well away from gain peak, resulted in {ital g}{sub 0}= 10.8%/cm, {alpha}{similar to}0.70%/cm, and {ital I}{sub {ital s}} = 7.9 MW/cm{sup 2} for the same ArF mixture. Several amplified spontaneous emission and oscillator measurements have also been performed. Indications of laser gain saturation at high-power electron-beam deposition have been deduced.

DOE Contract Number:
AC04-76DP00789
OSTI ID:
5167262
Journal Information:
Journal of Applied Physics; (United States), Vol. 70:8; ISSN 0021-8979
Country of Publication:
United States
Language:
English