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Microstructural evolution of titania sol-gel thin films

Book ·
OSTI ID:51671
; ; ; ;  [1]
  1. YTC America Inc., Camarillo, CA (United States)

Thin films of crystalline titania with different grain sizes and porosities were prepared by dip-coating on Si (100) substrates starting from a sol-gel process. Three synthesis procedures were developed and compared, using acetylacetone (acac, with HCl) and acetic acid (HOAc) as modifying agents or directly using hydrochloric acid as catalyst. The structural evolution of the films was characterized by Glazing Angle X-ray Diffraction (XRD), Spectroscopic Ellipsometry and Atomic Force Microscopy (AFM). Anatase phase was observed on all of the films calcined at 440 C. The grain sizes and crystallinity generally increased with calcination temperature. Thin films obtained from acac and HOAc-modified titanium sols had fine grains (50--80 nm) and less porosity (<10%) after calcination at 1,000 C. Thin films derived from the sol catalyzed directly with acid had the largest grains (90--130 nm), higher crystallinity and greater porosity (17%).

OSTI ID:
51671
Report Number(s):
CONF-940411--; ISBN 1-55899-246-4
Country of Publication:
United States
Language:
English