Magnetically-excited flexural plate wave resonator
- Sandia National Labs., Albuquerque, NM (United States). Microsensor Research and Development Dept.
A flexural plate wave (FPW) resonator was constructed by patterning current lines on a silicon nitride membrane suspended on a rectangular silicon frame. Eigenmodes of the rectangular membrane were excited using Lorentz forces generated between alternating surface currents and a static in-plane magnetic field. The magnetic field strength required for these devices can be achieved with small permanent magnets ({approx} 1 cm{sup 3}). Preferential coupling to a particular membrane mode was achieved by positioning current lines along longitudinal mode antinodes. An equivalent-circuit model was derived that characterizes the input impedance of a one-port device and the transmission response of a two-port device over a range of frequencies near a single membrane resonance. Experiments were performed to characterize the effects of varying magnetic field, ambient gas, gas pressure, and input power. To the authors` knowledge, this is the first experimental demonstration of a resonant FPW device.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 515585
- Report Number(s):
- SAND--97-1779C; CONF-9705139--2; ON: DE97007913
- Country of Publication:
- United States
- Language:
- English
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