Scanning attractive force microscope using photothermal vibration

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.585187· OSTI ID:5152061

Umeda, N; Ishizaki, S; Uwai, H ^[1]

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1. Tokyo Univ. of Agriculture and Tech., (Japan)

This paper describes an attractive force microscope using photothermal vibration. A cantilever is vibrated by the optical absorption of a laser beam whose intensity modulation frequency is at resonance frequency, and the vibration is detected by an optical deflection method. The characteristics of the photothermal vibration and the attractive force gradient versus tip-sample distance have been measured with a Ni foil cantilever. Topographic images of digital memory disks made from a polycarbonate and Mg-Al alloy were recorded.

• OSTI ID: 5152061
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Journal Name: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States) Vol. 9:2; ISSN 0734-211X; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

440800* -- Miscellaneous Instrumentation-- (1990-)
47 OTHER INSTRUMENTATION
ALLOYS
ALUMINIUM ALLOYS
ALUMINIUM BASE ALLOYS
DESIGN
ELECTROMAGNETIC RADIATION
ELEMENTS
LASER RADIATION
MAGNESIUM ALLOYS
MAGNETIC DISKS
MAGNETIC STORAGE DEVICES
MATHEMATICS
MECHANICAL VIBRATIONS
MEMORY DEVICES
METALS
MICROSCOPES
NICKEL
OPTICS
RADIATIONS
TOPOLOGY
TRANSITION ELEMENTS