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Title: Characterization of RF sputtered ZnO piezoelectric films using transmission electron microscope

Conference ·

Research Organization:
Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)
DOE Contract Number:
W-7405-ENG-48
OSTI ID:
5127907
Report Number(s):
LBL-3775; CONF-750825-3
Resource Relation:
Journal Volume: 33; Conference: 33. annual meeting of the Electron Microscopy Society of America, Las Vegas, NV, USA, 11 Aug 1975
Country of Publication:
United States
Language:
English