Computer simulation of reflection of and sputtering by plasma particles
Journal Article
·
· Fusion Technol.; (United States)
OSTI ID:5120696
The SEISM Monte Carlo code, which is similar to the well-known TRIM code, is applied to plasma particles; Maxwellian energy and isotropic angle distribution is assumed for the plasma particles. The effects of plasma and monoenergetic particle (deuterium) bombardment on a solid (nickel), i.e., sputtering, particle and energy reflection, implantation, etc., in the 0.1- to 10-keV energy and ion temperature range are compared. Also, the effect of the sheath potential at 100-eV ion temperature is investigated.
- Research Organization:
- Central Research Institute for Physics, H-1525 Budapest, P.O. Box 49 (HU)
- OSTI ID:
- 5120696
- Journal Information:
- Fusion Technol.; (United States), Journal Name: Fusion Technol.; (United States) Vol. 12:3; ISSN FUSTE
- Country of Publication:
- United States
- Language:
- English
Similar Records
Physical sputtering code for fusion applications
Modeling and analysis of surface roughness effects on sputtering, reflection, and sputtered particle transport
Light ion sputtering of metals and low Z compounds as studied with the Monte-Carlo code TRIM
Conference
·
Thu Oct 01 00:00:00 EDT 1981
·
OSTI ID:6420020
Modeling and analysis of surface roughness effects on sputtering, reflection, and sputtered particle transport
Conference
·
Sun Dec 31 23:00:00 EST 1989
·
OSTI ID:6477390
Light ion sputtering of metals and low Z compounds as studied with the Monte-Carlo code TRIM
Conference
·
Sat Sep 01 00:00:00 EDT 1984
· Fusion Technol.; (United States)
·
OSTI ID:5526310
Related Subjects
656003* -- Condensed Matter Physics-- Interactions between Beams & Condensed Matter-- (1987-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANGULAR DISTRIBUTION
CHANNELING
CHARGED PARTICLES
COMPUTER CODES
COMPUTERIZED SIMULATION
DEUTERIUM IONS
DIFFERENTIAL EQUATIONS
DISTRIBUTION
ELEMENTS
EQUATIONS
ION CHANNELING
ION TEMPERATURE
IONS
MAXWELL EQUATIONS
METALS
MONTE CARLO METHOD
NICKEL
PARTIAL DIFFERENTIAL EQUATIONS
PLASMA
S CODES
SIMULATION
SOLID-STATE PLASMA
SPUTTERING
T CODES
TRANSITION ELEMENTS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANGULAR DISTRIBUTION
CHANNELING
CHARGED PARTICLES
COMPUTER CODES
COMPUTERIZED SIMULATION
DEUTERIUM IONS
DIFFERENTIAL EQUATIONS
DISTRIBUTION
ELEMENTS
EQUATIONS
ION CHANNELING
ION TEMPERATURE
IONS
MAXWELL EQUATIONS
METALS
MONTE CARLO METHOD
NICKEL
PARTIAL DIFFERENTIAL EQUATIONS
PLASMA
S CODES
SIMULATION
SOLID-STATE PLASMA
SPUTTERING
T CODES
TRANSITION ELEMENTS