The effect of implantation temperature on the surface hardness, elastic modulus and Raman scattering in amorphous carbon

Journal Article · Sun Jun 01 00:00:00 EDT 1997 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.119092· OSTI ID:508945

Lee, D; Lee, H; Park, B ^[1]; Poker, D B; Riester, L ^[2]

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1. School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245 (United States)
2. Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831 (United States)

Nitrogen implantation into amorphous carbon has been studied at various implantation temperatures by using 100 keV N{sup +} at 5 {mu}A and fluences of 2{times}10{sup 17} ions/cm{sup 2}. The apparent surface hardness and elastic modulus from nanoindentation are well correlated with an asymmetric diffuse peak at around 1500 cm{sup {minus}1} and a broad band at {approximately}700 cm{sup {minus}1} in the Raman spectra. Both the enhanced strengths and Raman characteristics show very weak Arrhenius-type implantation-temperature dependence with activation enthalpies of approximately 20 meV in the temperature range 223{minus}1073 K. {copyright} {ital 1997 American Institute of Physics.}

• Research Organization: Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 508945
• Journal Information: Applied Physics Letters, Vol. 70, Issue 23; Other Information: PBD: Jun 1997
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CARBON
ION IMPLANTATION
NITROGEN
SURFACE HARDENING
ENTHALPY
AMORPHOUS STATE
HARDNESS
ELASTICITY
RAMAN SPECTRA
TEMPERATURE DEPENDENCE
NITROGEN ADDITIONS