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Theoretical evidence for efficient p-type doping of GaN using beryllium

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.118766· OSTI ID:508924
;  [1];  [2]
  1. INFM-Dipartimento di Scienze Fisiche, Universita di Cagliari, via Ospedale 72, I-09124 Cagliari (Italy)
  2. TECHSO S.p.A., Zona Industriale Est, I-09122 Cagliari (Italy)

{ital Ab initio} calculations predict that Be is a shallow acceptor in GaN. Its thermal ionization energy is 0.06 eV in wurtzite GaN; the level is valence resonant in the zincblende phase. Be incorporation is severely limited by the formation of Be{sub 3}N{sub 2}. It is shown, however, that co-incorporation with reactive species can enhance the solubility. H-assisted incorporation should lead to high doping levels in metal-organic-chemical-vapor deposition growth after post-growth annealing at about 850 K. Be-O co-incorporation produces high Be and O concentrations at molecular beam epitaxy growth temperatures. {copyright} {ital 1997 American Institute of Physics.}

OSTI ID:
508924
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 22 Vol. 70; ISSN 0003-6951; ISSN APPLAB
Country of Publication:
United States
Language:
English