Internal motion in high vacuum systems
Conference
·
OSTI ID:5044105
Three transfer and positioning mechanisms have been developed for the non-air exposed, multi-step processing of components in vacuum chambers. The functions to be performed in all of the systems include ultraviolet/ozone cleaning, vacuum baking, deposition of thin films, and thermocompression sealing of the enclosures. Precise positioning of the components is required during the evaporation and sealing processes. The three methods of transporting and positioning the components were developed to accommodate the design criteria and goals of each individual system. Considerations affecting design included cost, contamination control, level of vacuum, material throughput, ease of operation, maintenance requirements and serviceability.
- Research Organization:
- General Electric Co., St. Petersburg, FL (USA). Neutron Devices Dept.
- DOE Contract Number:
- AC04-76DP00656
- OSTI ID:
- 5044105
- Report Number(s):
- GEPP-OP-674; CONF-821111-27; ON: DE86001646
- Country of Publication:
- United States
- Language:
- English
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