skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Development of an extended straightness measurement reference

Abstract

The most accurate diamond turning machines have used physical straightness references. These references commonly are made of optical materials, such as Zerodur, and are flat enough to permit straightness measurements with an accuracy of 100--150 nm (4--6 microinches) p-v. In most cases, the flatness error is stable and can be accommodated by using a calibration table. The straightedges for the Large Optics Diamond Turning Machine (LODTM) at Lawrence Livermore National Laboratory (LLNL) are 1.1 meters in length and allow a straightness reference accuracy of 25--50 nm (1--2 microinches) p-v after calibration. Fabrication problems become insurmountable when a straightness reference for a length of up to 4 meters is desired. Moreover, the method of calibration by straightedge reversal does not account for gravitational sag when the sensing direction is vertical. Vertical sensing would be required in a four meter system and sag would become unacceptably large. Recent developments published in the literature suggest that the use of a laser beam for a reference may be feasible. Workers at Osaka University have reported a laser beam straightness reference that has a resolution of 3.5 nm, although tests were done only over a 200 mm length. LLNL has begun an investigation on themore » use of a directionally stabilized laser beam as a straightness measurement reference. The goal of the investigation is to provide a reference that is accurate to 25 nm (1 microinch) over a four meter distance. 3 refs., 2 figs.« less

Authors:
;  [1];  [2]
  1. Lawrence Livermore National Lab., CA (USA)
  2. Zygo Corp., Santa Cruz, CA (USA)
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (USA)
Sponsoring Org.:
DOE/DP
OSTI Identifier:
5041180
Report Number(s):
UCRL-99540; CONF-8810335-2
ON: DE90006781
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Conference
Resource Relation:
Conference: 3. annual precision engineering conference of the American Society for Precision Engineering, Atlanta, GA (USA), 24-27 Oct 1988
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; DIAMONDS; MACHINING; MEASURING METHODS; ACCURACY; CALIBRATION; COMPUTERIZED SIMULATION; DIFFRACTION; FABRICATION; GAUSS FUNCTION; LASERS; MEASURING INSTRUMENTS; OPTICAL PROPERTIES; REMOTE SENSING; STABILITY; TECHNOLOGY ASSESSMENT; VACUUM SYSTEMS; CARBON; COHERENT SCATTERING; ELEMENTAL MINERALS; ELEMENTS; FUNCTIONS; MINERALS; NONMETALS; PHYSICAL PROPERTIES; SCATTERING; SIMULATION; 440800* - Miscellaneous Instrumentation- (1990-); 426001 - Engineering- Superconducting Devices & Circuits- (1990-)

Citation Formats

Schenz, R. F., Griffith, L. V., and Sommargren, G. E. Development of an extended straightness measurement reference. United States: N. p., 1988. Web.
Schenz, R. F., Griffith, L. V., & Sommargren, G. E. Development of an extended straightness measurement reference. United States.
Schenz, R. F., Griffith, L. V., and Sommargren, G. E. 1988. "Development of an extended straightness measurement reference". United States. https://www.osti.gov/servlets/purl/5041180.
@article{osti_5041180,
title = {Development of an extended straightness measurement reference},
author = {Schenz, R. F. and Griffith, L. V. and Sommargren, G. E.},
abstractNote = {The most accurate diamond turning machines have used physical straightness references. These references commonly are made of optical materials, such as Zerodur, and are flat enough to permit straightness measurements with an accuracy of 100--150 nm (4--6 microinches) p-v. In most cases, the flatness error is stable and can be accommodated by using a calibration table. The straightedges for the Large Optics Diamond Turning Machine (LODTM) at Lawrence Livermore National Laboratory (LLNL) are 1.1 meters in length and allow a straightness reference accuracy of 25--50 nm (1--2 microinches) p-v after calibration. Fabrication problems become insurmountable when a straightness reference for a length of up to 4 meters is desired. Moreover, the method of calibration by straightedge reversal does not account for gravitational sag when the sensing direction is vertical. Vertical sensing would be required in a four meter system and sag would become unacceptably large. Recent developments published in the literature suggest that the use of a laser beam for a reference may be feasible. Workers at Osaka University have reported a laser beam straightness reference that has a resolution of 3.5 nm, although tests were done only over a 200 mm length. LLNL has begun an investigation on the use of a directionally stabilized laser beam as a straightness measurement reference. The goal of the investigation is to provide a reference that is accurate to 25 nm (1 microinch) over a four meter distance. 3 refs., 2 figs.},
doi = {},
url = {https://www.osti.gov/biblio/5041180}, journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Sep 06 00:00:00 EDT 1988},
month = {Tue Sep 06 00:00:00 EDT 1988}
}

Conference:
Other availability
Please see Document Availability for additional information on obtaining the full-text document. Library patrons may search WorldCat to identify libraries that hold this conference proceeding.

Save / Share: