Selectively thermalized sputtering for the deposition of magnetic films with special anisotropies

Journal Article · Sun May 01 04:00:00 EDT 1988 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.575305· OSTI ID:5030702

Cadieu, F J

Special sputtering methods have been developed which allow films of rare-earth transition-metal permanent magnet systems that exhibit special magnetic anisotropies to be synthesized. Films have been synthesized that exhibit an easy direction of magnetization either out of the film plane, in the film plane, or in a particular direction within the plane of the films. Magnetic films have been applied during the sputter deposition to control the desired magnetic properties. Systems such as Nd/sub 2/Fe/sub 14/B have been synthesized so as to exhibit an easy axis either in or out of the film plane by varying the sputtering parameters. Films based on Sm/sub 2/Co/sub 17/ have been crystallized directly onto heated substrates that exhibit as sputtered in the film plane static energy products of 26 MG Oe. Films of SmCo/sub 5/ have been made that exhibit coercivities >22 kOe and in-the-film-plane anisotropy constants of >10/sup +7/ erg/cm/sup 3/. Recently, similar films have been made in the Sm--Ti--Fe system.

• Research Organization: Physics Department, Queens College of CUNY, Flushing, New York 11367
• OSTI ID: 5030702
• Journal Information: J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 6:3; ISSN JVTAD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360101* -- Metals & Alloys-- Preparation & Fabrication
360104 -- Metals & Alloys-- Physical Properties
ALLOYS
ANISOTROPY
BORON ALLOYS
COBALT ALLOYS
COBALT BASE ALLOYS
COERCIVE FORCE
CRYSTALLIZATION
FABRICATION
FILMS
IRON ALLOYS
IRON BASE ALLOYS
MAGNETIC PROPERTIES
MAGNETIZATION
MAGNETS
NEODYMIUM ALLOYS
PERMANENT MAGNETS
PHASE TRANSFORMATIONS
PHYSICAL PROPERTIES
RARE EARTH ALLOYS
SAMARIUM ALLOYS
SPUTTERING
THIN FILMS