Laser diagnostic experiments on KrF laser ablation plasma-plume dynamics relevant to manufacturing applications

Journal Article · Sun May 01 04:00:00 EDT 1994 · Physics of Plasmas; (United States)

DOI:https://doi.org/10.1063/1.870663· OSTI ID:5006881

Gilgenbach, R M; Ching, C H; Lash, J S; Lindley, R A ^[1]

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1. Intense Energy Beam Interaction Laboratory, Nuclear Engineering Department, University of Michigan, Ann Arbor, Michigan 48109-2104 (United States)

A brief review is given of the potential applications of laser ablation in the automotive and electronics manufacturing industries. Experiments are presented on KrF laser ablation of three materials relevant to manufacturing applications: aluminum metal vs aluminum--nitride (AlN) and alumina (Al[sub 2]O[sub 3]) ceramics. Plasma and neutral-atom diagnostic data are presented from resonant-holographic-interferometry, dye-laser-resonance-absorption photography, and HeNe laser deflection. Data show that plasma electron densities in excess of 10[sup 18] cm[sup [minus]3] exist in the ablation of AlN, with lower densities in Al and Al[sub 2]O[sub 3]. Aluminum neutral and ion expansion velocities are in the range of cm/[mu]s. Ambipolar electric fields are estimated to be 5--50 V/cm.

• OSTI ID: 5006881
• Journal Information: Physics of Plasmas; (United States), Journal Name: Physics of Plasmas; (United States) Vol. 1:5; ISSN PHPAEN; ISSN 1070-664X
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700350* -- Plasma Production
Heating
Current Drive
& Interactions-- (1992-)
ABLATION
ABSORPTION
ALUMINIUM
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
ALUMINIUM OXIDES
CERAMICS
CHALCOGENIDES
ELECTROMAGNETIC RADIATION
ELECTRON DENSITY
ELEMENTS
EXCIMER LASERS
GAS LASERS
HELIUM-NEON LASERS
KRYPTON FLUORIDE LASERS
LASER RADIATION
LASER-PRODUCED PLASMA
LASERS
METALS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PLASMA
PLASMA DIAGNOSTICS
PNICTIDES
RADIATIONS
RESONANCE ABSORPTION
SORPTION