Temporal evolution of the electron distribution function in an electron cyclotron resonant discharge

Journal Article · Fri Nov 15 04:00:00 EST 1991 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.350240· OSTI ID:5003047

Brown, M R; Sheridan, T E; Hayes, M A ^[1]

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1. Department of Physics and Astronomy, Dartmouth College, Hanover, New Hampshire (USA)

We present time-resolved experimental measurements of the electron distribution function {ital f}({ital v}{sub {parallel}},{ital v}{sub {perpendicular}},{ital t}) in a pulsed, partially ionized, electron cyclotron resonance (ECR)-produced plasma. The discharge has some characteristics similar to those used in plasma processing applications. These properties include ECR production in a strong magnetic field and low electron temperature ({ital T}{sub {ital e}}{lt}5 eV). In addition, electron-neutral collisions play an important role. A novel analyzer is used to study the dependence of {ital f}({ital v}{sub {parallel}},{ital v}{sub {perpendicular}},{ital t}) on velocities both parallel and perpendicular to the magnetic field. This information cannot be obtained with a simple Langmuir probe. The temporal evolution of {ital f}({ital v}{sub {parallel}},{ital v}{sub {perpendicular}},{ital t}) is examined during plasma formation, with the source biased, with the source grounded and in the afterglow.

• OSTI ID: 5003047
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 70:10; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700102* -- Fusion Energy-- Plasma Research-- Diagnostics
DISTRIBUTION FUNCTIONS
ECR HEATING
ELECTRONS
ELEMENTARY PARTICLES
FERMIONS
FUNCTIONS
HEATING
HIGH-FREQUENCY HEATING
LEPTONS
PLASMA DIAGNOSTICS
PLASMA HEATING
TIME DEPENDENCE