Pulsed laser deposition of Si nanocluster films
The studies of light emission from Si-related materials have attracted attention in the past several years because of the potential applications for optoelectronic devices. Reactive laser ablation of Si targets by ArF* excimer laser (wavelength 193 nm, pulse width 15 ns (FWHM)) was performed in He, Ar or O{sub 2} 0.05--1 Torr atmospheres and led to Si-SiO{sub x} nanocluster thin film formation within laser-induced plasma plume. Optical spectroscopy and optical Time-of-Flight (TOF) measurements were carried out during ablation-deposition experiments. A number of large weak emission bands in blue and green-yellow spectral branches were observed both in inert gases and in oxygen ambient atmospheres and attributed to the emission from excited nanoparticles in the plasma plume. TOF measurements proved a different spatio-temporal evolution of this emission compare to the emission of monoatomic particles. The films exhibit photoluminescence bands in the UV region (around 290 nm and between 310--370 nm), in the blue (between 240 and 500 nm), and in the green-yellow (at 520--560 nm). The relative intensities of the luminescence bands depend on the average cluster size, which is determined by preparation conditions (nature and pressure of the ambient gas, laser fluence).
- OSTI ID:
- 490862
- Report Number(s):
- CONF-951155-; ISBN 1-55899-300-2; TRN: IM9729%%113
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995; Other Information: PBD: 1996; Related Information: Is Part Of Advanced laser processing of materials -- Fundamentals and applications; Singh, R. [ed.] [Univ. of Florida, Gainesville, FL (United States)]; Norton, D. [ed.] [Oak Ridge National Lab., TN (United States)]; Laude, L. [ed.] [Univ. of Mons-Hainaut, Mons (Belgium)]; Narayan, J. [ed.] [North Carolina State Univ., Raleigh, NC (United States)]; Cheung, J. [ed.] [Rockwell International Science Center, Thousand Oaks, CA (United States)]; PB: 693 p.; Materials Research Society symposium proceedings, Volume 397
- Country of Publication:
- United States
- Language:
- English
Similar Records
Species-resolved imaging and gated photon counting spectroscopy of laser ablation plume dynamics during KrF- and ArF-laser PLD of amorphous diamond films
Experimental and computational study of complex shockwave dynamics in laser ablation plumes in argon atmosphere