VALVES FOR CONTROLLING GAS STREAMS FLOWING AT VERY LOW FLOW RATES
Patent
·
OSTI ID:4842794
A gas valve for very low flow rates is designed which may be used to supply gas to ion sources or to measure the pumping rate of a molecular vacuum pump. The valve contains a needle-seat member which is adjustable by thermal expansion. Graphs are presented showing the effects of diametrical play, pressure, and adjustment parameters on the flow rate. (D.L.C.)
- Research Organization:
- Originating Research Org. not identified
- NSA Number:
- NSA-15-029347
- OSTI ID:
- 4842794
- Report Number(s):
- CA 620840
- Country of Publication:
- Canada
- Language:
- English
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