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MULTIPLE ELECTRON BEAM ION PUMP AND SOURCE

Patent ·
OSTI ID:4816261
A vacuum pump is designed which operates by ionizing incoming air and by withdrawing the ions from the system by means of electrical fields. The apparatus comprises a cylindrical housing communicable with the vessel to be evacuated and having a thin wall section in one end. Suitable coils provide a longitudinal magnetic field within the cylinder. A broad cathode and an anode structure is provided to establish a plurality of adjacent electron beams which are parallel to the cylinder axis. Electron reflector means are provided so that each of the beams constitutes a PIG or reflex discharge. Such structure provides a large region in which incoming gas molecules may be ionized by electron bombardment. A charged electrode assembly accelerates the ions through the thin window, thereby removing the gas from the system. The invention may also be utilized as a highly efficient ion source. (AEC)
Research Organization:
Originating Research Org. not identified
NSA Number:
NSA-16-008858
Assignee:
U.S. Atomic Energy Commission
Patent Number(s):
US 3022933
OSTI ID:
4816261
Country of Publication:
United States
Language:
English

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