Reduction of residual charge in surface-neutralization-based neutral beams
Conference
·
OSTI ID:481554
Hyperthermal-neutral beams have been proposed as a charge-free alternative to plasmas in select processing steps. Existing prototype sources include three generic types: gas-dynamic, ion-neutral-charge-exchange and ion-surface-neutralization beam sources. The authors find that in surface-neutralization type sources, which have the highest flux, residual current can still flow to the substrate. However, this charged particle flux is several orders of magnitude smaller than the hyperthermal-neutral flux. Here they discuss the source of this residual current and methods for further reductions. This is important to the semiconductor industry.
- Research Organization:
- Princeton Univ., NJ (United States). Plasma Physics Lab.
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- AC02-76CH03073
- OSTI ID:
- 481554
- Report Number(s):
- PPPL-CFP--3694; CONF-970575--2; ON: DE97005275
- Country of Publication:
- United States
- Language:
- English
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