SELECTIVE PUMPING OF LIGHT AND HEAVY GASES WITH A MOLECULAR PUMP
For some plasma experiments high purity hydrogen or deuterium at pressures of 10/sup -3/ Torr or less is required. It is shown that a molecular pump can be used as a combination pumping, gas injection, and gas purification system. The gas is admitted to the fore vacuum side and streams back to the high vacuum side. This does not materially affect the pumping of heavy impurities. Performance data for this mode of operation are given for the Pfeiffer pump TVP- 500. (auth)
- Research Organization:
- Princeton Univ., N.J.
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-17-003096
- OSTI ID:
- 4778796
- Report Number(s):
- MATT-128
- Journal Information:
- Rev. Sci. Instr., Journal Name: Rev. Sci. Instr. Vol. Vol: 33
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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