Effects of internal scattering on X-ray microtomography image reconstruction
- Rensselaer Polytechnic Inst., Troy, NY (United States). Center for Integrated Electronics and Electronics Manufacturing
A computer simulation is used to study the problem of internal scattering for targets that are imaged using X-ray microtomography. A strategy is outlined for selecting X-ray energy and image resolution based on properties of the material being imaged. The X-ray scanning process is simulated by applying a Monte Carlo technique to a modeled target that emulates the material properties of a microelectronic device. The X-ray photons are subject to photoelectric absorption, Rayleigh scattering, and Compton scattering. The simulation applies a method of high-resolution image reconstruction based on discrete Fourier transforms. Examples of reconstructed images that have 0.5-{micro}m spatial resolution are shown for images of simulated lead and aluminum targets.
- OSTI ID:
- 477313
- Journal Information:
- IEEE Transactions on Nuclear Science, Vol. 44, Issue 2; Other Information: PBD: Apr 1997
- Country of Publication:
- United States
- Language:
- English
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