BAKABLE ULTRA-HIGH VACUUM VALVE
Patent
·
OSTI ID:4771031
S>This patent relates to a valve useful in applications involving successively closing and opening a communication between a chamber evacuated to an ultra-high vacuum condition of the order of 10/sup -10/ millimeters of mercury and another chamber or the ambient. The valve is capable of withstanding extended baking at 450 deg C and repeated opening and closing without repiacement of the valve seat (approximately 200 cycle limit). The seal is formed by mutual interdiffusion weld, coerced by a pneumatic actuator. (AEC)
- Research Organization:
- Originating Research Org. not identified
- NSA Number:
- NSA-17-012417
- Assignee:
- U.S. Atomic Energy Commission
- Patent Number(s):
- US 3043323
- OSTI ID:
- 4771031
- Resource Relation:
- Other Information: Orig. Receipt Date: 31-DEC-63
- Country of Publication:
- United States
- Language:
- English
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