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U.S. Department of Energy
Office of Scientific and Technical Information

BAKABLE ULTRA-HIGH VACUUM VALVE

Patent ·
OSTI ID:4771031

S>This patent relates to a valve useful in applications involving successively closing and opening a communication between a chamber evacuated to an ultra-high vacuum condition of the order of 10/sup -10/ millimeters of mercury and another chamber or the ambient. The valve is capable of withstanding extended baking at 450 deg C and repeated opening and closing without repiacement of the valve seat (approximately 200 cycle limit). The seal is formed by mutual interdiffusion weld, coerced by a pneumatic actuator. (AEC)

Research Organization:
Originating Research Org. not identified
NSA Number:
NSA-17-012417
Assignee:
U.S. Atomic Energy Commission
Patent Number(s):
US 3043323
OSTI ID:
4771031
Country of Publication:
United States
Language:
English

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