Surface-micromachined resonant accelerometer
- Univ. of California, Berkeley, CA (United States). Berkeley Sensor and Actuator Center
- Sandia National Labs., Albuquerque, NM (United States)
This paper discusses the design and testing results of a resonant accelerometer developed for integrated surface-micromachining processes.First- and second-generation designs are presented. The sensors use leverage mechanisms to transfer force from a proof mass to double-ended tuning fork (DETF) resonators, used as force transducers. Each fork forms the basis of an integrated oscillator to provide the output waveforms. The DETF`s on the first-generation device have a nominal frequency of 175 kHz, and the sensor has a measured scale factor of 2.4 Hz/g. The oscillators on this device exhibit a root Allan variance floor of 38 mHz (220 ppb). The second-generation, higher-sensitivity sensor uses DETF`s with a nominal frequency of 68 kHz and has measured a scale factor of 45 Hz/g.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 474910
- Report Number(s):
- SAND-97-0831C; CONF-970646-3; ON: DE97004640; TRN: AHC29711%%80
- Resource Relation:
- Conference: 9. international conference on solid-state sensors and actuators, Chicago, IL (United States), 16-19 Jun 1997; Other Information: PBD: 2 Apr 1997
- Country of Publication:
- United States
- Language:
- English
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