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Title: CHARACTERISTICS OF ION-IMPLANTED CONTACTS FOR NUCLEAR PARTICLE DETECTORS. PART II. CONCENTRATION DISTRIBUTION IN ION-IMPLANTED CONTACTS FOR SEMICONDUCTOR DETECTORS.

Technical Report ·
OSTI ID:4721697

Research Organization:
Kernforschungszentrum, Karlsruhe (West Germany). Institut fuer Angewandte Kernphysik
NSA Number:
NSA-24-005884
OSTI ID:
4721697
Report Number(s):
EUR-4269
Resource Relation:
Other Information: UNCL. Orig. Receipt Date: 31-DEC-70
Country of Publication:
Country unknown/Code not available
Language:
English