CP-MAS NMR and in-situ FTIR study of AlN surface reactivity
- Pennsylvania State Univ., University Park, PA (United States)
The hydrolytic stability of aluminum nitride (AlN) is an important issue from the standpoint of technology developments of AlN as an electronic packaging material. Although numerous studies have been made of the hydrolysis of AlN and characterization of the reaction products, an understanding of the interaction between surface sites and molecular species is still lacking. A combination of Magic-Angle-Spinning Nuclear Magnetic Resonance (MAS NMR) and in-situ Fourier Transform Infrared (FTIR) spectroscopies was used to study the surface reactivity of AlN. The specimens used were specially fabricated self-supported AlN films of high-surface-area ({approximately} 25 m{sup 2}/g), made by nitridation of sol-gel derived pseudoboehmite (AlO(OH)). The in-situ FTIR spectra suggest the formation of a surface layer on the AlN films upon storage. MAS NMR was used to further characterize the surface layer. Using the chemical shifts obtained by {sup 1}H-{sup 27}Al Cross Polarization (CP) MAS NMR experiments, the authors were able to identify the surface cation sites. The assignment of these sites to Al{sup 3+} cations in either tetrahedral coordination with nitrogen or octahedral coordination with oxygen was used to monitor the evolution of the surface upon exposure to the atmosphere. The results indicate that high-surface-area AlN rapidly acquires a surface layer (probably AlO(OH)/Al(OH){sub 3}) upon exposure to the atmosphere.
- OSTI ID:
- 470934
- Report Number(s):
- CONF-951155-; ISBN 1-55899-313-4; TRN: IM9722%%57
- Resource Relation:
- Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 27 Nov - 1 Dec 1995; Other Information: PBD: 1996; Related Information: Is Part Of Covalent ceramics III -- Science and technology of non-oxides; Hepp, A.F. [ed.] [National Aeronautics and Space Administration, Cleveland, OH (United States). Lewis Research Center]; Kumta, P.N. [ed.] [Carnegie Mellon Univ., Pittsburgh, PA (United States)]; Sullivan, J.J. [ed.] [MKS Instruments, Andover, MA (United States)]; Fischman, G.S. [ed.] [Food and Drug Administration, Rockville, MD (United States)]; Kaloyeros, A.E. [ed.] [Univ. of Albany, NY (United States)]; PB: 499 p.; Materials Research Society symposium proceedings, Volume 410
- Country of Publication:
- United States
- Language:
- English
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