MASS SPECTROMETRIC DETERMINATION OF IONIZATION PRESSURE GAUGE SENSITIVITIES

Journal Article · Sat Jun 01 04:00:00 EDT 1963 · Rev. Sci. Instr.

DOI:https://doi.org/10.1063/1.1718551· OSTI ID:4687633

Anderson, H U

A new method was devised for calibrating ion gages for measurements of pressures of gases other than N/sub 2/. A mass spectrometer signal is obtained as a function of the apparent pressure in the ion gage. A high-pressure mixture of N/sub 2/ and some other gas of known composition is allowed to leak into the system to establish a steady-state pressure, and the resulting mass spectrometer is used to compute the sensitivity of the gage to the second gas. The sensitivities to Ar, CO, O/sub 2/, and NO were measured relative to N/sub 2/ and compared with other literature values. (D.L.C.)

• Research Organization: Univ. of California, Berkeley
• NSA Number: NSA-17-027668
• OSTI ID: 4687633
• Journal Information: Rev. Sci. Instr., Journal Name: Rev. Sci. Instr. Vol. Vol: 34
• Country of Publication: Country unknown/Code not available
• Language: English

Related Subjects

ARGON
CARBON MONOXIDE
GAGES
INSTRUMENTS AND INSTRUMENTATION
IONIZATION
MASS SPECTROMETERS
MEASURED VALUES
NITROGEN
NITROGEN OXIDES
OXYGEN
PRESSURE
SENSITIVITY