Dynamics of electronegative plasmas for materials processing. Final report
The purpose of this project is to study the equilibrium particle and energy balance and the heating mechanisms in electronegative r.f. discharges. Particular attention is given to the formation of non-Maxwellian electron distributions and their effect on the macroscopic parameters. The research includes theory, particle-in-cell simulation, and experimental investigations. The sheath heating theory and the simulation results developed for electropositive plasmas are used to guide the investigations. The investigation was centered on, but is not limited to, the study of oxygen feedstock gas in capacitively and inductively coupled r.f. discharges. 15 refs.
- Research Organization:
- California Univ., Berkeley, CA (United States). Electronics Research Lab.
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- FG03-87ER13727
- OSTI ID:
- 465305
- Report Number(s):
- DOE/ER/13727--T4; ON: DE97003695
- Country of Publication:
- United States
- Language:
- English
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