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Title: Growth and mechanical and tribological characterization of multi-layer hard carbon films

Abstract

Vacuum-arc deposition is used to deposit multilayer C films by modulating the sample bias during deposition. Effect of varying the sublayer thickness in multilayer films consisting of alternating layers of ``hard`` (68.4 GPa, -100 V bias) and ``soft`` (27.5 GPa, - 200 V bias) was investigated. Films consisting of equal thickness layers of hard and soft material and an individual layer thickness varying from 10 to 35 nm were deposited. Mechanical property measurements were obtained by finite element modeling of nanoindentation load-displacement curves. The film hardness values were about 20% below the average of the component layers and relatively independent of the layer thickness. TEM revealed deterioration of the multilayer structure when the sublayer thickness was below 15 nm due to implantation damage of the hard layers caused by the energetic C{sup +} ions of the soft layers (-2000 V bias) deposited over them. Pin-on-disk wear tests show that the wear rate drops when sublayer thickness is decreased below 20 nm and remains constant with further decreases in the layer thickness.

Authors:
; ;  [1]; ;  [2]; ; ;  [3]
  1. Lawrence Livermore National Lab., CA (United States)
  2. Sandia National Labs., Albuquerque, NM (United States)
  3. Los Alamos National Lab., NM (United States)
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
459945
Report Number(s):
SAND-97-0479C; CONF-961202-90
ON: DE97004370
DOE Contract Number:  
AC04-94AL85000; AC03-76SF00098
Resource Type:
Conference
Resource Relation:
Conference: 1996 Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 2-6 Dec 1996; Other Information: PBD: [1996]
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CARBON; DEPOSITION; MECHANICAL PROPERTIES; LAYERS; FILMS; HARDNESS; CARBON IONS; WEAR

Citation Formats

Ager, J., Brown, I., Monteiro, O., Knapp, J.A., Follstaedt, D.M., Nastasi, M., Walter, K.C., and Maggiore, C.J. Growth and mechanical and tribological characterization of multi-layer hard carbon films. United States: N. p., 1996. Web.
Ager, J., Brown, I., Monteiro, O., Knapp, J.A., Follstaedt, D.M., Nastasi, M., Walter, K.C., & Maggiore, C.J. Growth and mechanical and tribological characterization of multi-layer hard carbon films. United States.
Ager, J., Brown, I., Monteiro, O., Knapp, J.A., Follstaedt, D.M., Nastasi, M., Walter, K.C., and Maggiore, C.J. Tue . "Growth and mechanical and tribological characterization of multi-layer hard carbon films". United States. https://www.osti.gov/servlets/purl/459945.
@article{osti_459945,
title = {Growth and mechanical and tribological characterization of multi-layer hard carbon films},
author = {Ager, J. and Brown, I. and Monteiro, O. and Knapp, J.A. and Follstaedt, D.M. and Nastasi, M. and Walter, K.C. and Maggiore, C.J.},
abstractNote = {Vacuum-arc deposition is used to deposit multilayer C films by modulating the sample bias during deposition. Effect of varying the sublayer thickness in multilayer films consisting of alternating layers of ``hard`` (68.4 GPa, -100 V bias) and ``soft`` (27.5 GPa, - 200 V bias) was investigated. Films consisting of equal thickness layers of hard and soft material and an individual layer thickness varying from 10 to 35 nm were deposited. Mechanical property measurements were obtained by finite element modeling of nanoindentation load-displacement curves. The film hardness values were about 20% below the average of the component layers and relatively independent of the layer thickness. TEM revealed deterioration of the multilayer structure when the sublayer thickness was below 15 nm due to implantation damage of the hard layers caused by the energetic C{sup +} ions of the soft layers (-2000 V bias) deposited over them. Pin-on-disk wear tests show that the wear rate drops when sublayer thickness is decreased below 20 nm and remains constant with further decreases in the layer thickness.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1996},
month = {12}
}

Conference:
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