Self-consistent rate theory of submonolayer homoepitaxy with attachment/detachment kinetics
Journal Article
·
· Physical Review, B: Condensed Matter
- Lawrence Livermore National Laboratory, Livermore, California 94551 (United States)
- School of Physics, Georgia Institute of Technology, Atlanta, Georgia 30332 (United States)
The reversible nucleation and growth of two-dimensional islands during the submonolayer stage of epitaxial growth is studied with self-consistent rate equations and kinetic Monte Carlo simulations. In contrast to most previous work, we take account of the effects of both a finite energy barrier to the detachment of atoms from islands and a finite barrier to the incorporation of adatoms into islands. A correct boundary condition for the diffusion field at island edges is derived that takes account of these processes. For small detachment rates, quantitative agreement is obtained between the solutions to the rate theory and the simulations for the average monomer and island densities as a function of coverage. {copyright} {ital 1997} {ital The American Physical Society}
- DOE Contract Number:
- FG05-88ER45369
- OSTI ID:
- 450352
- Journal Information:
- Physical Review, B: Condensed Matter, Journal Name: Physical Review, B: Condensed Matter Journal Issue: 4 Vol. 55; ISSN 0163-1829; ISSN PRBMDO
- Country of Publication:
- United States
- Language:
- English
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