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Macroscopically smooth Si layer growth by LPE on cast metallurgical-grade Silicon substrates

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.49380· OSTI ID:450128
; ;  [1]
  1. National Renewable Energy Laboratory, Golden, Colorado 80401 (United States)

An ideal solvent system, Cu-Al, has been found for growth of Si layers with thicknesses of tens of microns on cast MG-Si substrates by LPE at temperatures near 900{degree}C. This solvent system utilizes Al to ensure good wetting between the solution and substrate by removing silicon native oxides, and employs Cu to control Al doping into the layers. Isotropic growth is achieved because of a high concentration of solute silicon in the solution and the resulting microscopically rough interface. As a result, macroscopically smooth Si layers have been grown on cast MG-Si that are suitable for device fabrications. The thin layers ({approximately}30 {mu}m) grown on the MG-Si substrates have doping levels of 3{times}10{sup 17} cm{sup {minus}3} and up, benign grain boundaries, and minority-carrier diffusion lengths greater than the layer thicknesses. {copyright} {ital 1996 American Institute of Physics.}

Research Organization:
National Renewable Energy Laboratory
DOE Contract Number:
AC36-83CH10093
OSTI ID:
450128
Report Number(s):
CONF-9605265--
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 353; ISSN 0094-243X; ISSN APCPCS
Country of Publication:
United States
Language:
English