Principles and applications of ion beam techniques for the analysis of solids and thin films
Journal Article
·
· Thin Solid Films, v. 17, no. 1, pp. 1-41
- Research Organization:
- California Inst. of Tech., Pasadena
- Sponsoring Organization:
- USDOE
- NSA Number:
- NSA-28-017924
- OSTI ID:
- 4449042
- Journal Information:
- Thin Solid Films, v. 17, no. 1, pp. 1-41, Other Information: Orig. Receipt Date: 31-DEC-73
- Country of Publication:
- Country unknown/Code not available
- Language:
- English
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Related Subjects
*CARBON IONS- BACKSCATTERING
*FILMS- RADIATION SCATTERING ANALYSIS
*HELIUM IONS- BACKSCATTERING
*ION BEAMS- BACKSCATTERING
*NITROGEN IONS- BACKSCATTERING
*RADIATION SCATTERING ANALYSIS- REVIEWS
*SOLIDS- RADIATION SCATTERING ANALYSIS
*STRUCTURAL CHEMICAL ANALYSIS- NUCLEAR REACTIONS
BIBLIOGRAPHIES
ENERGY RANGE
KEV RANGE 01-10
KEV RANGE 100-1000
MEV RANGE 01- 10
MICROANALYSIS
SILICON
*FILMS- RADIATION SCATTERING ANALYSIS
*HELIUM IONS- BACKSCATTERING
*ION BEAMS- BACKSCATTERING
*NITROGEN IONS- BACKSCATTERING
*RADIATION SCATTERING ANALYSIS- REVIEWS
*SOLIDS- RADIATION SCATTERING ANALYSIS
*STRUCTURAL CHEMICAL ANALYSIS- NUCLEAR REACTIONS
BIBLIOGRAPHIES
ENERGY RANGE
KEV RANGE 01-10
KEV RANGE 100-1000
MEV RANGE 01- 10
MICROANALYSIS
SILICON