Prolonged laser ablation effects of YBCO ceramic targets during thin film deposition: Influence of processing parameters

Journal Article · Sun Dec 01 00:00:00 EST 1996 · Journal of Low Temperature Physics

DOI:https://doi.org/10.1007/BF00753881· OSTI ID:443663

Tomov, R; Tsaneva, V; Tsanev, V; Ouzounov, D ^[1]

---

1. Institute of Electronics, Sofia (Bulgaria)

Cumulative laser irradiation during high-T{sub c} superconducting thin film pulsed laser deposition (PLD) may have a detrimental effect on film characteristics. Initial decrease of deposition rate and gradual shift of the center of the deposited material spot towards the incoming laser beam were registered on cold glass substrates. Their absorbance was used for evaluation of the film thickness distribution over the substrate area. At the initial stage, two components of the spot could be distinguished along its short axis: central ({approximately}cos{sup n}{theta}, n>>1) and peripherial ({approximately}cos{theta}), while with cumulative irradiation the thickness followed an overall cos{sup m}{theta} (m

• Sponsoring Organization: USDOE
• OSTI ID: 443663
• Report Number(s): CONF-960808-; ISSN 0022-2291; CNN: Grant CIPA-CT94-0193; Grant 425; TRN: 97:000865-0036
• Journal Information: Journal of Low Temperature Physics, Vol. 105, Issue 5-6; Conference: 3. international conference on physics and chemistry of molecular and oxide superconductors, Karlsruhe (Germany), 2-6 Aug 1996; Other Information: PBD: Dec 1996
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
YTTRIUM OXIDES
PHYSICAL VAPOR DEPOSITION
BARIUM OXIDES
COPPER OXIDES
HIGH-TC SUPERCONDUCTORS
SUPERCONDUCTING FILMS
PULSE TECHNIQUES
LASER RADIATION