Predicting ion charge state distributions of vacuum arc plasmas

Conference · Tue Dec 31 04:00:00 EST 1996

OSTI ID:441531

Anders, A ^[1]; Schuelke, T ^[2]

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1. Lawrence Berkeley National Lab., CA (United States)
2. Fraunhofer Inst. for Materials Physics and Surface Engineering, Dresden (Germany)

Multiply charged ions are present in vacuum arc plasmas. The ions arc produced at cathode spots, and their charge state distributions (CSDs) depend on the cathode material but only little on the arc current or other parameters as long as the current is relatively low and the anode is not actively involved in the plasma production. There are experimental data of ion CSDs available in the literature for 50 different cathode materials. The CSDs can be calculated based on the assumption that thermodynamic equilibrium is valid in the vicinity of the cathode spot, and the equilibrium CSDs {open_quotes}freeze{close_quotes} at a certain distance from the cathode spot (transition to a non-equilibrium plasma). Plasma temperatures and densities at the {open_quotes}freezing points{close_quotes} have been calculated, and, based on the existence of characteristic groups of elements in the Periodic Table, predictions of CSDs can be made for metallic elements which have not yet been used as cathode materials.

• DOE Contract Number: AC03-76SF00098
• OSTI ID: 441531
• Report Number(s): CONF-960723--
• Country of Publication: United States
• Language: English

Related Subjects

66 PHYSICS
CHARGE STATES
DISTRIBUTION
ELECTRIC ARCS
HIGH VACUUM
ION SOURCES
IONS
METALS
PLASMA