Integrated chemiresistor and work function solid state microsensor array
Conference
·
OSTI ID:441321
- Environmental Molecular Sciences Lab., Richland, WA (United States)
The conducting polymer, polyaniline, was used in fabricating the polyaniline gate field-effect transistors (PANIFETs). The polymer gate was formed at the wafer level by spin-coating chemically prepared polyaniline (PANIC) from a solution of formic acid, patterning photolithographically, and etching in oxygen plasma. Contact to the gate was realized through two platinum lines positioned on both sides of the polyaniline gate. This sensor design allowed the simultaneous measurement of work function and impedance changes.
- DOE Contract Number:
- AC06-76RL01830
- OSTI ID:
- 441321
- Report Number(s):
- CONF-960782-; TRN: 96:006557-0092
- Resource Relation:
- Conference: 6. international meeting on chemical sensors, Gaithersburg, MD (United States), 22-25 Jul 1996; Other Information: PBD: 1996; Related Information: Is Part Of The 6th international meeting on chemical sensors; PB: 313 p.
- Country of Publication:
- United States
- Language:
- English
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