CoO-doped SiO{sub 2} nanocomposite films for nitrogen oxide sensing

Conference · Tue Dec 31 00:00:00 EST 1996

OSTI ID:441310

Yasumoto, Katsuya; Koshizaki, Naoto; Terauchi, Shin-ya ^[1]

---

1. National Inst. of Materials and Chemical Research, Ibaraki (Japan)

Optical properties of nanocomposite dispersed with semiconductor or metal have been extensively investigated to obtain high third-order nonlinear susceptibility X(3) in recent years. In the chemical sensor field, optical transmittance change of nanoparticles or thin films was reported to be changed by gas atmosphere. In order to develop nanocomposites with gas sensor functionality, three components, (a) functional nanoparticles which change their optical property, (b) nanopores which give paths of gas molecules, (c) transparent matrix, must be unified. The authors developed gas-sensing semiconductor-doped nanocomposite which changes their optical transmittance by NO using sol-gel and sputtering method. In this paper, the authors deal with the basic gas sensing properties and sensing mechanism of CoO-doped SiO{sub 2} nanocomposite (CoO/SiO{sub 2}) prepared by co-sputtering method.

• OSTI ID: 441310
• Report Number(s): CONF-960782-; TRN: 96:006557-0081
• Resource Relation: Conference: 6. international meeting on chemical sensors, Gaithersburg, MD (United States), 22-25 Jul 1996; Other Information: PBD: 1996; Related Information: Is Part Of The 6th international meeting on chemical sensors; PB: 313 p.
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
33 ADVANCED PROPULSION SYSTEMS
20 FOSSIL-FUELED POWER PLANTS
36 MATERIALS SCIENCE
54 ENVIRONMENTAL SCIENCES
NITRIC OXIDE
MONITORING
MEASURING INSTRUMENTS
PERFORMANCE
COBALT OXIDES
CRYSTAL DOPING
FILMS
DESIGN
SILICA
SOL-GEL PROCESS
SPUTTERING