CoO-doped SiO{sub 2} nanocomposite films for nitrogen oxide sensing
Conference
·
OSTI ID:441310
- National Inst. of Materials and Chemical Research, Ibaraki (Japan)
Optical properties of nanocomposite dispersed with semiconductor or metal have been extensively investigated to obtain high third-order nonlinear susceptibility X(3) in recent years. In the chemical sensor field, optical transmittance change of nanoparticles or thin films was reported to be changed by gas atmosphere. In order to develop nanocomposites with gas sensor functionality, three components, (a) functional nanoparticles which change their optical property, (b) nanopores which give paths of gas molecules, (c) transparent matrix, must be unified. The authors developed gas-sensing semiconductor-doped nanocomposite which changes their optical transmittance by NO using sol-gel and sputtering method. In this paper, the authors deal with the basic gas sensing properties and sensing mechanism of CoO-doped SiO{sub 2} nanocomposite (CoO/SiO{sub 2}) prepared by co-sputtering method.
- OSTI ID:
- 441310
- Report Number(s):
- CONF-960782--
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
20 FOSSIL-FUELED POWER PLANTS
33 ADVANCED PROPULSION SYSTEMS
36 MATERIALS SCIENCE
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
54 ENVIRONMENTAL SCIENCES
COBALT OXIDES
CRYSTAL DOPING
DESIGN
FILMS
MEASURING INSTRUMENTS
MONITORING
NITRIC OXIDE
PERFORMANCE
SILICA
SOL-GEL PROCESS
SPUTTERING
33 ADVANCED PROPULSION SYSTEMS
36 MATERIALS SCIENCE
44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
54 ENVIRONMENTAL SCIENCES
COBALT OXIDES
CRYSTAL DOPING
DESIGN
FILMS
MEASURING INSTRUMENTS
MONITORING
NITRIC OXIDE
PERFORMANCE
SILICA
SOL-GEL PROCESS
SPUTTERING