Characterization of micromachined chemical gas sensors
- Motorola, Inc., Phoenix, AZ (United States)
- Centre Electronique de Toulouse (France)
While there are many different types of gas sensors and detecting materials that have been available for many years, metal oxides are commonly used for the detection of gases to include carbon monoxide (CO), hydrogen sulfide (H{sub 2}S), methane (CH{sub 4}), and other hydrocarbons. These sensors are used in environmental, commercial, home, and industrial applications. Tin oxide (SnO{sub 2}) is very stable in air and is readily processed using ceramic or thin-film techniques. With the addition of a catalyst, sensitizing element, or temperature variation to the tin oxide film, other gases of interest may be detected. Tin oxide sensors may be fabricated in bulk or thin film form. Thin film structures have the advantages of batch fabrication, low power consumption, and ability for future integration. The performance of a micromachined tin oxide sensor design was measured and is reported here.
- OSTI ID:
- 441308
- Report Number(s):
- CONF-960782-; TRN: 96:006557-0079
- Resource Relation:
- Conference: 6. international meeting on chemical sensors, Gaithersburg, MD (United States), 22-25 Jul 1996; Other Information: PBD: 1996; Related Information: Is Part Of The 6th international meeting on chemical sensors; PB: 313 p.
- Country of Publication:
- United States
- Language:
- English
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