A study of surface exchange at semiconducting Ga{sub 2}O{sub 3} thin film sensors for better sensitivity and higher selectivity
- Siemens AG Corporate Research and Development, Munich (Germany)
After the deposition of the surface layer, an annealing at least at 100{degrees}C above the desired operation temperature of the sensor for about 12h has been applied to ensure stability of the characteristics. The specimens have been characterised with respect to the surface morphology (SEM, AFM), atomic depth profile (SIMS, RBS) and crystalline phases (XRD) to identify the status of the applied material on the tempered sensor elements. The tested gases have been CH{sub 4}, CO, H{sub 2}, Iso-Butene, Acetone, Ethanol, NO, NH{sub 3} and a change of the oxygen concentration in wet air with concentrations typical for air monitoring. The temperatures tested range between 600-950{degrees}C. Long-term tests have been performed for some interesting modification. Especially with the oxides of the transition metaloxids, fundamental changes in the gas sensitivities of the sensors have been found due to their catalytic activity. Another important aspect was the change of the base resistance which showed whether the electrical conductivity occurs via the Ga{sub 2}O{sub 3} layer (as intender) or via the additional metal oxide layer.
- OSTI ID:
- 441283
- Report Number(s):
- CONF-960782-; TRN: 96:006557-0054
- Resource Relation:
- Conference: 6. international meeting on chemical sensors, Gaithersburg, MD (United States), 22-25 Jul 1996; Other Information: PBD: 1996; Related Information: Is Part Of The 6th international meeting on chemical sensors; PB: 313 p.
- Country of Publication:
- United States
- Language:
- English
Similar Records
Chemo-chromic Pd-V{sub 2}O{sub 5} Sensors for Passive Hydrogen Detection in Nuclear Containments - 18268
Activities of activated Mo(Co)/sub 6//Al/sub 2/O/sub 3/ catalysts for the hydrogenation of propylene and the hydrogenolysis of alkanes and cyclopropane
Related Subjects
INCLUDING NUCLEAR AND PARTICLE DETECTORS
33 ADVANCED PROPULSION SYSTEMS
20 FOSSIL-FUELED POWER PLANTS
54 ENVIRONMENTAL SCIENCES
METHANE
MONITORING
CARBON MONOXIDE
HYDROGEN
BUTENES
ACETONE
ETHANOL
NITRIC OXIDE
AMMONIA
OXYGEN
X-RAY DIFFRACTION
ELECTRIC CONDUCTIVITY
DESIGN
PERFORMANCE
MEASURING INSTRUMENTS
GALLIUM OXIDES
THIN FILMS
SEMICONDUCTOR MATERIALS
ANNEALING
SCANNING ELECTRON MICROSCOPY
ION SCATTERING ANALYSIS