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Doping effect of SnO{sub 2} on gas sensing characteristics of sputtered ZnO thin film chemical sensor

Conference ·
OSTI ID:441279
; ;  [1]
  1. Kanazawa Inst. of Technology, Ishikawa (Japan); and others

Although oxide semiconductors such as ZnO, SnO{sub 2} and TiO{sub 2} are popularly used as the material for ceramic-type gas sensors, some new type of sensing materials are still being studied and exploited at the present time. In this paper, the authors studied gas sensing characteristics of ZnO thin film chemical sensor which is doped with SnO{sub 2}.

OSTI ID:
441279
Report Number(s):
CONF-960782--
Country of Publication:
United States
Language:
English